Foto einer Messung im Außenbereich

Vibrations and Micro-/Nanotechnology

Fabrication in semiconductor industry and nanotechnology requires an extremely low level of vibration for accurate production. In many cases the natural subsoil oscillation already exceeds the tolerable level. Then the FAB building requires a special dynamic design in order to reduce the dynamical effects. At the same time, the vibrations produced by machines or humans inside the building have to be minimized to ensure a continous fabrication.

Picture of a clean room Picture of Prof. Dr. Heiland in cleanroom dress Picture of a stand in a clean room

Our services are:

Global corporations such as Infineon, Siemens, Bosch, AMD, IBM and many more entrust us with the structural dynamic part of their projects.

For our references click here.