Vibrations and Micro-/Nanotechnology
Fabrication in semiconductor industry and nanotechnology requires an extremely low level of vibration for accurate production. In many cases the natural subsoil oscillation already exceeds the tolerable level. Then the FAB building requires a special dynamic design in order to reduce the dynamical effects. At the same time, the vibrations produced by machines or humans inside the building have to be minimized to ensure a continous fabrication.
Our services are:
- Consulting on all matters of structural dynamics
- Measurements of subsoil vibrations using special equipment for vibrations in nanotechnology
- Conceptual design of a FAB building
- Modelling and calculation with Finite Elements Method (FEM)
- Dynamic design of foundations
- Reduction of existing vibration levels
- Consulting on low-vibration building services and installations
- Verification of the prognosticated immission level by vibration measurements
Global corporations such as Infineon, Siemens, Bosch, AMD, IBM and many more entrust us with the structural dynamic part of their projects.
For our references click here.