Low Vibration Stands

Projects 2017

AMS, Graz, Austria

Vibration measurements on the waffle slab, design of several stands and quality control measurements.
Jenoptik Diode Lab, Berlin

Site evaluation for a stepper and design of the pedestal.
Siemens AG, Berlin

Design and construction drawings of a pedestal for a robot.

Global Foundries

Design and construction drawings of several stands.
ISIT Fraunhofer Itzehoe

Stands for a new clean room at Fraunhofer ISIT, Itzehoe.
Dr. Johannes Heidenhain, Traunreut

Pedestals for pick and place tools in modular design for Dr. Johannes Heidenhain, Traunreut.
AMTC, Dresden

Pedestal for an E-Beam, inspection tools, SEM and other devices at AMTC (Advanced Mask Technology Center).
ENAS Fraunhofer Chemnitz

Stands for an E-Beam tool at ENAS, Fraunhofer Chemnitz.
Bosch, Reutlingen

Design und construction drawings of a stand for an implanter.
Elmos Semiconductor AG, Dortmund

Dynamic design and acceptance measurement of a pedestal for a new Nikon Stepper 14EX12 in clean room.

Global Foundries

Design und construction drawing of several stands.
SIB Technikum Dresden

Dynamic design of several stands for vibration sensitive devices in the new Technikum Dresden building.
IHP GmbH, Frankfurt (Oder)

Preliminary investigation for the installation of an OVL-3 (KLA Tencor Archer 100).
Carl Zeiss SMT Group, Oberkochen

Design of the underframe of a granite plate for worktop mounting and several other stands.
Vishay Siliconix Itzehoe GmbH

Dynamic investigation of structural vibrations for the installation of a Scanners /Stepper.
Fritz-Haber-Institut Berlin

Stand design for a new PL laser laboratory at Fritz-Haber-Institut in Berlin.
AMTC Dresden

Design and construction drawings of 7 pedestals for vibration sensitive tools.

Global Foundries

Design und construction drawing of several stands.
Texas Instruments, Munich

Dynamic Investigation for Nikon scanners SNC 01 and SNC 02. Evaluation of the production area.
Peikert BMS GmbH

Conception of structural dynamics and stand design for the installation of Siemens Siplace SX1/SX2 devices in a Siemens building in Berlin.

Global Foundries

Pedestal for ASML Stepper STP1401 and several other stands.
IDE GmbH, Raunheim

FEM analysis and construction drawings for a foundation of a SEM DTU Jeol JBX900.

This list of references contains selected projects and is not complete.